Title: Airgard
Description: Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tai
Keywords:
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water-soluble gases,
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semiconductor gases,
toxic gasses(
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